The Structure of Wheel Check Valve Influence on Air Block Phenomenon of Piezoelectric Micro-Pump

Abstract: To improve the stability and reliability of the piezoelectric micro-pump, the cause of air block phenomenon is analyzed on the structure of wheel check valve. During the movement of the bubble in the micro-channel, pressure drop occurs, the main factor which influences the bubble going through is opening height of the wheel check valve. Five groups of wheel check valves with different structures are used to test the wheel check valve opening height and air block probability. The experiment results show that reducing the wheel check valve thickness or diameter ratio can both increase the wheel check valve opening height, and decrease the air block probability. Through experiment, the optimum combination of the wheel check valve structure is obtained within the samples: as the thickness is 0.02 mm, the diameter ratio is 1.2, the wheel check valve opening height gets 252 μm, and within the given bubble volume, the air block probability is less than 2%.